(Characteristic)
Description |
Model |
AIIP-800A |
AIIP-1050A |
AIIP-1200A |
Chamber |
Size |
¦800*1100H |
¦1050*1300H |
¦1200*1500H |
Type |
Front Door or Horizontal |
|||
Pumping System |
D/P |
5500§¤ /sec |
8500§¤ /sec*2 |
13000§¤ /sec*2 |
MBP |
300§© /hr |
600§© /hr |
1000§© /hr |
|
R/P |
1500§¤ /min |
3000§¤ /min |
6000§¤ /min |
|
Power Supply |
DC |
Anode, Filament, Bias |
||
AC |
Evaporation Filament |
|||
Measuring Unit |
Thickness Monitor |
Crystal Monitor |
||
Vacuum Gauge |
Multi Vacuum Gauge, Digital |
|||
Evaporation Method |
Resistance Heating & Wire Feeding System |
|||
Gas Control System |
M F C |